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平面研磨機鏡面加工技術

　　對于研磨機來說，主要是在(zai)維持(chi)研磨所取得良(liang)好的(de)平面(mian)(mian)度(du)前提下，去(qu)除工(gong)件表(biao)面(mian)(mian)微(wei)小(xiao)的(de)凸起(qi)和(he)表(biao)面(mian)(mian)損傷層，以(yi)獲得鏡面(mian)(mian)光度(du)。所以(yi)要求均與(yu)、無方向(xiang)性地拋光整個工(gong)件表(biao)面(mian)(mian)。反映在(zai)速度(du)上，就是工(gong)件表(biao)面(mian)(mian)上每一點的(de)相對速度(du)大小(xiao)應在(zai)任何時候都保持(chi)恒定。

　　平面(mian)(mian)研磨機(ji)鏡面(mian)(mian)加(jia)(jia)(jia)(jia)工(gong)(gong)技(ji)術是一門(men)新興(xing)的(de)(de)綜合性加(jia)(jia)(jia)(jia)工(gong)(gong)技(ji)術，它集成了(le)現代機(ji)械、光學、電子計(ji)算(suan)機(ji)、測(ce)量(liang)及材(cai)料等(deng)先進技(ji)術成就，已(yi)成為國家科學技(ji)術發(fa)展(zhan)水(shui)平的(de)(de)重要(yao)標志。隨(sui)著(zhu)各種(zhong)新型功能陶瓷(ci)材(cai)料的(de)(de)不斷(duan)研制成功，以及這(zhe)些材(cai)料在各種(zhong)高性能電子元器件、光學、信息系統等(deng)領域的(de)(de)廣泛應(ying)用，要(yao)求元件和零件的(de)(de)加(jia)(jia)(jia)(jia)工(gong)(gong)精(jing)度越來越高，有(you)的(de)(de)甚至要(yao)求達(da)到(dao)納米(mi)級或更(geng)高的(de)(de)加(jia)(jia)(jia)(jia)工(gong)(gong)精(jing)度以及無損(sun)傷的(de)(de)表面(mian)(mian)加(jia)(jia)(jia)(jia)工(gong)(gong)質量(liang)。

　　工(gong)(gong)(gong)(gong)(gong)(gong)件(jian)是不變(bian)形(xing)(xing)的(de)剛(gang)體(ti)，拋(pao)(pao)(pao)(pao)光(guang)(guang)盤(pan)是能按工(gong)(gong)(gong)(gong)(gong)(gong)件(jian)加(jia)工(gong)(gong)(gong)(gong)(gong)(gong)面形(xing)(xing)狀變(bian)形(xing)(xing)的(de)彈性體(ti)。這時可以(yi)忽(hu)略介于兩(liang)者之(zhi)間(jian)的(de)磨粒與(yu)加(jia)工(gong)(gong)(gong)(gong)(gong)(gong)液的(de)厚度和形(xing)(xing)狀變(bian)化，認為(wei)工(gong)(gong)(gong)(gong)(gong)(gong)件(jian)與(yu)拋(pao)(pao)(pao)(pao)光(guang)(guang)盤(pan)間(jian)貼緊;當工(gong)(gong)(gong)(gong)(gong)(gong)件(jian)尺(chi)寸大于拋(pao)(pao)(pao)(pao)光(guang)(guang)盤(pan)半(ban)徑(jing)，或(huo)偏心(xin)距過(guo)大時，工(gong)(gong)(gong)(gong)(gong)(gong)件(jian)會露出拋(pao)(pao)(pao)(pao)光(guang)(guang)盤(pan)，既(ji)有(you)一部分表面不能與(yu)拋(pao)(pao)(pao)(pao)光(guang)(guang)盤(pan)始(shi)終接(jie)觸(chu);當研磨或(huo)拋(pao)(pao)(pao)(pao)光(guang)(guang)過(guo)程中，工(gong)(gong)(gong)(gong)(gong)(gong)件(jian)材(cai)料平(ping)行(xing)度誤差超(chao)出允許范圍時就需(xu)要對其平(ping)行(xing)度進行(xing)修正。 在平(ping)面拋(pao)(pao)(pao)(pao)光(guang)(guang)機的(de)鏡(jing)面拋(pao)(pao)(pao)(pao)光(guang)(guang)加(jia)工(gong)(gong)(gong)(gong)(gong)(gong)工(gong)(gong)(gong)(gong)(gong)(gong)序中，可以(yi)認為(wei)工(gong)(gong)(gong)(gong)(gong)(gong)件(jian)的(de)去除(chu)量主要是由磨削(xue)路徑(jing)的(de)長度決定的(de)，因此直接(jie)控制工(gong)(gong)(gong)(gong)(gong)(gong)件(jian)表面的(de)磨削(xue)路徑(jing)長度能夠(gou)更加(jia)精確控制工(gong)(gong)(gong)(gong)(gong)(gong)件(jian)的(de)去除(chu)量。