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平面研磨機鏡面加工技術

　　對(dui)于研磨機來說，主要是在(zai)(zai)維(wei)持(chi)研磨所取得良好(hao)的(de)平面(mian)(mian)度(du)前提下，去除(chu)工件(jian)表(biao)面(mian)(mian)微小的(de)凸(tu)起和表(biao)面(mian)(mian)損傷(shang)層，以獲得鏡面(mian)(mian)光度(du)。所以要求均與、無方向(xiang)性地拋光整個工件(jian)表(biao)面(mian)(mian)。反映在(zai)(zai)速度(du)上(shang)，就是工件(jian)表(biao)面(mian)(mian)上(shang)每一點的(de)相對(dui)速度(du)大小應在(zai)(zai)任何時候(hou)都(dou)保(bao)持(chi)恒定。

　　平面(mian)(mian)研(yan)磨機鏡面(mian)(mian)加(jia)工(gong)(gong)技(ji)術是一(yi)門新興的(de)綜(zong)合(he)性(xing)加(jia)工(gong)(gong)技(ji)術，它集成(cheng)(cheng)了現代機械、光學、電子計算機、測(ce)量(liang)及材料(liao)等先(xian)進技(ji)術成(cheng)(cheng)就，已成(cheng)(cheng)為國家科學技(ji)術發展水平的(de)重要標志。隨著各(ge)種新型功能(neng)陶瓷材料(liao)的(de)不斷研(yan)制成(cheng)(cheng)功，以及這(zhe)些材料(liao)在(zai)各(ge)種高性(xing)能(neng)電子元器件、光學、信(xin)息系統等領域的(de)廣泛應用，要求元件和零件的(de)加(jia)工(gong)(gong)精(jing)度越(yue)來越(yue)高，有的(de)甚(shen)至要求達到納米級或更高的(de)加(jia)工(gong)(gong)精(jing)度以及無損傷的(de)表面(mian)(mian)加(jia)工(gong)(gong)質(zhi)量(liang)。

　　工(gong)(gong)(gong)件(jian)是不(bu)變形(xing)的(de)(de)(de)剛體，拋(pao)(pao)光(guang)(guang)(guang)盤(pan)是能按工(gong)(gong)(gong)件(jian)加工(gong)(gong)(gong)面形(xing)狀變形(xing)的(de)(de)(de)彈性體。這時(shi)可以忽略介于兩(liang)者之間的(de)(de)(de)磨(mo)粒與加工(gong)(gong)(gong)液的(de)(de)(de)厚度(du)和形(xing)狀變化，認為工(gong)(gong)(gong)件(jian)與拋(pao)(pao)光(guang)(guang)(guang)盤(pan)間貼緊;當(dang)工(gong)(gong)(gong)件(jian)尺寸大于拋(pao)(pao)光(guang)(guang)(guang)盤(pan)半徑(jing)，或偏心距過大時(shi)，工(gong)(gong)(gong)件(jian)會露出(chu)拋(pao)(pao)光(guang)(guang)(guang)盤(pan)，既(ji)有一部分表面不(bu)能與拋(pao)(pao)光(guang)(guang)(guang)盤(pan)始終接觸;當(dang)研磨(mo)或拋(pao)(pao)光(guang)(guang)(guang)過程中(zhong)，工(gong)(gong)(gong)件(jian)材料平行度(du)誤差(cha)超出(chu)允許范圍(wei)時(shi)就需要對其平行度(du)進行修正。 在平面拋(pao)(pao)光(guang)(guang)(guang)機(ji)的(de)(de)(de)鏡面拋(pao)(pao)光(guang)(guang)(guang)加工(gong)(gong)(gong)工(gong)(gong)(gong)序(xu)中(zhong)，可以認為工(gong)(gong)(gong)件(jian)的(de)(de)(de)去除量主要是由磨(mo)削路徑(jing)的(de)(de)(de)長度(du)決(jue)定的(de)(de)(de)，因此直接控(kong)制工(gong)(gong)(gong)件(jian)表面的(de)(de)(de)磨(mo)削路徑(jing)長度(du)能夠更加精確控(kong)制工(gong)(gong)(gong)件(jian)的(de)(de)(de)去除量。